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Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa
  • Publsiher : William Andrew
  • Release : 12 August 2022
  • ISBN : 1437734839
  • Pages : 644 pages
  • Rating : 4/5 from 21 ratings
GET THIS BOOKHandbook of Sputter Deposition Technology

Summary:
Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.


Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
  • Publisher : William Andrew
  • Release : 12 August 2022
GET THIS BOOKHandbook of Sputter Deposition Technology

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry

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Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Peter M. Martin
  • Publisher : William Andrew
  • Release : 01 December 2009
GET THIS BOOKHandbook of Deposition Technologies for Films and Coatings

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

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Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Shigeru Hayakawa
  • Publisher : William Andrew Publishing
  • Release : 01 January 1992
GET THIS BOOKHandbook of Sputter Deposition Technology

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

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Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology
  • Author : Kiyotaka Wasa
  • Publisher : William Andrew
  • Release : 31 December 2012
GET THIS BOOKHandbook of Sputter Deposition Technology

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials

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Handbook of Physical Vapor Deposition (PVD) Processing

Handbook of Physical Vapor Deposition (PVD) Processing
  • Author : D. M. Mattox
  • Publisher : Cambridge University Press
  • Release : 19 September 2014
GET THIS BOOKHandbook of Physical Vapor Deposition (PVD) Processing

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed

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Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology
  • Author : Jerome J. Cuomo,Stephen M. Rossnagel,Harold R. Kaufman
  • Publisher : William Andrew
  • Release : 12 August 1989
GET THIS BOOKHandbook of Ion Beam Processing Technology

This book, by 36 authorities on the subject, deals with ion beam processing for basic sputter etching of samples, for sputter deposition of thin films, for synthesis of material in thin film form, and of the modification of thin film properties.

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Handbook of Thin Film Technology

Handbook of Thin Film Technology
  • Author : Hartmut Frey,Hamid R. Khan
  • Publisher : Springer Science & Business Media
  • Release : 06 May 2015
GET THIS BOOKHandbook of Thin Film Technology

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

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Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings
  • Author : Rointan Framroze Bunshah
  • Publisher : William Andrew
  • Release : 12 August 1994
GET THIS BOOKHandbook of Deposition Technologies for Films and Coatings

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

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Handbook of Chemical Vapor Deposition

Handbook of Chemical Vapor Deposition
  • Author : Hugh O. Pierson
  • Publisher : William Andrew
  • Release : 02 December 2012
GET THIS BOOKHandbook of Chemical Vapor Deposition

Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and

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Handbook of Industrial Refractories Technology

Handbook of Industrial Refractories Technology
  • Author : Stephen Caniglia,Gordon L. Barna
  • Publisher : William Andrew
  • Release : 31 December 1992
GET THIS BOOKHandbook of Industrial Refractories Technology

Encompasses the entire range of industrial refractory materials and forms: properties and their measurement, applications, manufacturing, installation and maintenance techniques, quality assurance, and statistical process control.

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Handbook of Vacuum Arc Science & Technology

Handbook of Vacuum Arc Science & Technology
  • Author : Raymond L. Boxman,David M. Sanders,Philip J. Martin
  • Publisher : William Andrew
  • Release : 31 December 1996
GET THIS BOOKHandbook of Vacuum Arc Science & Technology

This is a comprehensive text describing the basic physics and technological applications of vacuum arcs. Part I describes basic physics of the vacuum arc, beginning with a brief tutorial review of plasma and electrical discharge physics, then describes the arc ignition process, cathode and anode spots which serve as the locus for plasma generation, and resultant interelectrode plasma. Part II describes the applications of the vacuum arc for depositing thin films and coatings, refining metals, switching high power, and as

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Handbook of Hydrothermal Technology

Handbook of Hydrothermal Technology
  • Author : K. Byrappa,Masahiro Yoshimura
  • Publisher : Cambridge University Press
  • Release : 10 December 2008
GET THIS BOOKHandbook of Hydrothermal Technology

Quartz, zeolites, gemstones, perovskite type oxides, ferrite, carbon allotropes, complex coordinated compounds and many moreùall products now being produced using hydrothermal technology. Handbook of Hydrothermal Technology brings together the latest techniques in this rapidly advancing field in one exceptionally useful, long-needed volume. The handbook provides a single source for understanding how aqueous solvents or mineralizers work under temperature and pressure to dissolve and recrystallize normally insoluble materials, and decompose or recycle any waste material. The result, as the authors

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Handbook of Magneto-Optical Data Recording

Handbook of Magneto-Optical Data Recording
  • Author : Terry W. McDaniel,Randall Victora
  • Publisher : Elsevier
  • Release : 31 December 1995
GET THIS BOOKHandbook of Magneto-Optical Data Recording

This handbook brings together in a single volume expert contributions on the many aspects of MO data recording, including the materials in use, techniques for achieving recording function, and storage device subsystems. As a multiple author treatment, it brings perspective from many viewpoints and institutions. The insights delivered should be valuable to a wide audience from students to practitioners in all areas of information storage.

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Handbook of Refractory Carbides & Nitrides

Handbook of Refractory Carbides & Nitrides
  • Author : Hugh O. Pierson
  • Publisher : William Andrew
  • Release : 31 December 1996
GET THIS BOOKHandbook of Refractory Carbides & Nitrides

Refractory carbides and nitrides are useful materials with numerous industrial applications and a promising future, in addition to being materials of great interest to the scientific community. Although most of their applications are recent, the refractory carbides and nitrides have been known for over one hundred years. The industrial importance of the refractory carbides and nitrides is growing rapidly, not only in the traditional and well-established applications based on the strength and refractory nature of these materials such as cutting

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